nano-hardness tester

NanoScan-4D. Nanohardness tester

nano-hardness tester

NanoScan-3D. Nanohardness tester

Modular design of a measurement system is a general feature of the «NanoScan» devices. The basic measurement module is a key element of each measurement platform. There are Indentation Module for «NanoScan-4D» devices and Universal Module for nano-mechanical testing for «NanoScan-3D» devices.

The basic module of the «NanoScan-3D» devices realizes the range of measurement methods of mechanical properties materials and can be used for scanning the materials surface. The highest range for displacement of this module is a 10mkm. The highest load is a 100mN.

The basic module of «NanoScan-4D» devices allows to make indentation in according to ISO 14577 and GOST R 8.748-2011 in a wide range of loads and displacements. Basic variant of this module has the highest range for displacement a 300mkm and the highest load a 1N. If customer needed the ranges may be extended up to a 2N for load and to a 1mm for displacement.

Depending on the size of the selected platform device may comprise one, two or three measurement modules. As additional modules to the base may be used an optical microscope or an AFM unit. Depending on the device series it can be mounted additional components such as the lateral load sensor, the heating stage and the others. «NanoScan-3D» can be equipped with three-axis heterodyne interferometer.

Model range of the «NanoScan» devıces


NanoScan-4D Compact

Compact device is purposed for express obtaining the data of materials hardness and elastic modulus (Yong’s module) by instrumented indentation method in loads range up to 2 N. This model can be used for the study of mechanical properties measurements. On the basis of this model educational course of Lab works is created (duration 8-12 academic hours).


NanoScan-4D Standard

The basic model of the device realizes the main hardness, elastic modulus (and other mechanical parameters) measurement methods. Static and dynamic indentation and sclerometry methods are realized in this device. Surface relief measurement in contact and semi-contact profiler mode is possible. Optical microscope provides a high accuracy of mutual positioning of the indenter and the sample. Additional units and sensor are available for this model.



Fully functional measurement system realizes all the possible physical and mechanical properties measurement methods. Atomic force microscope module allows to research surface relief and images of prints left after indentation with a nanometer resolution. Device realizes automated procedure of conducting series of testing. Software allows to perforrm the processing of batch files.


NanoScan-3D Compact

The compact device is purposed for the research of a surface relief and the mechanical properties study of small samples. This device uses a range of SPM, indentation and sclerometry methods in the loads range up to 50mN. This model uses as an instrument for the educational Lab working course of physical and mechanical properties study at submicron and nanometer linear dimensional scale.


NanoScan-3D Standard

This model is purposed for the complex research of physical and mechanical properties in the loads range up to 100mN. The device is equipped with an optical microscope and a motorized object stage for the sample positioning. The high degree of measurement automatization allows to increase efficiency of measurements.



The metrological scanning probe microscope is equipped with heterodyne laser interferometer. This measurement device is purposed for using as a reference for the linear dimensional measurement at the nanometer scale. This functionality provides a traceability of the linear dimensional measurements of nanostructures by the SPMs methods. The main purpose is to determine metrological properties of other scanning probe microscopes. The device is used in industrial

environment for the technological control of nanotechnology products.


Probe sensors

p1 Piezoceramic
probe sensor
p2 Piezoceramic
probe sensor
and «Super-NanoScan»
p3 Piezoceramic
probe sensor
p4 Beam type
probe sensor


i1 Diamond Indentor.
Pyramid of Berkovich type
i2 Indentor
of alloy diamond
i3 Diamond Indentor
of Berkovich type
in a holder
i4 Diamond Indentor
of Vikkers type
in a holder
i5 Ceramic spherical tip holder

Standart samples

s1 Quartz

Hardness: 9,5 ± 1,0 GPa
Elastic modulus: 72,0 ± 3,0 GPа
Stiffness: < 5 nm
Size: Ø25×5 mm
Surface preparation: deep grinding-polishing

s2 Sapphire

Hardness: 22,5 ± 2,5 GPa
Elastic modulus: 415,0 ± 35,0 GPa
Stiffness: < 5 nm
Size: Ø25×5 mm
Surface preparation: epi-polishing

s3 Polycarbonate

Hardness: 0,3 ± 0,1 GPa
Elastic modulus: 4,5 ± 0,5 GPa
Stiffness: < 5 nm
Size: 10×10×7mm
Surface preparation:

s4  AluminumCharacteristics:
Hardness: 0,5 ± 0,1 GPa
Elastic modulus: 70,0 ± 7,0 GPa
Stiffness: < 5 nm
Size: 10×10×8 mm
Surface preparation: polishing, removal layer by electrolytic etching

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