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  Film Metrology and More…



At ThetaMetrisis, tools are tailored to customer’s needs without any compromise in accuracy, quality and after sales support.

ThetaMetrisis (www.thetametrisis.com) is a privately held company that was established in December 2008 in Athens, Greece by Ph.D. engineers in the field of optics and sensors technology. ThetaMetrisis is the first spin-off company of the Institute of Microelectronics, NCSR ‘Demokritos’. The company was focused on the design and manufacturing of optical metrology tools for the characterization of thin and thick films, the FR-Series. FR-tools are based on White Light Reflectance Spectroscopy (WLRS), a methodology that was developed at the Institute of Microelectronics, by ThetaMetrisis founders for accurate and simultaneous measurement of the thickness and the refractive index of stacked thin and thick films

ThetaMetrisis S.A.design & manufacture a wide range of turn-key optoelectronic characterization tools and holistic solutions for a wide spectrum of diverse applications, such as:

  • semiconductors,
  • organic electronics,
  • polymers,
  • paints and coatings,
  • photovoltaics,
  • biosensing
  • chemical sensing

Our tools are cost-affordable without any compromise in accuracy and versatility, thanks to the flexible tool design and parametrized software.


FR-SERIES PRODUCTS

FR-Basic FR-Basic, is a fully reconfigurable and extendable tool, that covers all customers’ measurement needs for Film Characterization (thickness, optical properties), Absorbance, Fluorescence, Reflectance. The customer can choose tool’s spectral range of operation in almost any part of the 200-2500nm range. A wide range of accessories can be used ….

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FR-Scanner FR-Scanner the optimum solution for fast, accurate and automatic characterization of thickness, optical properties, roughness of single films or stack of films over large areas or preselected positions through scanning.

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FR-Thermal FR-Thermal, is a particular FR-Basic configuration for in-situ Characterization of films (thickness, optical properties) under controlled thermal treatment up to 200C. FR-Thermal is ideal for thermal characterization of polymeric and photoresist films e.g. glass transition temperature, degardation temperature …

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FR-Liquid, is a particular FR-Basic configuration for in-situ Film Characterization (thickness, optical properties) in liquid enviroment. FR-Liquid is ideal for polymeric and photoresist film characterization e.g. Dissolution, Swelling …

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FR-Education FR-μProbe, is a cost affordable micro-spectroscopy solution for Film Characterization (thickness and optical properties) and standard optical measurements at miniaturized areas through optical microscope …

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FR-monitor FR-Monitor, is the control and data-processing software platform for all FR tools. The user can take single measurements or record dynamically in real-time a process e.g. measure the thickness & optical properties of multilayer stacks, measure Tg of polymers, record the absorption vs. time of a biological or chemical reaction, …

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FR-monitor FR-pOrtable, is a USB-powered, portable and handheld spectroscopic reflectance tool. With FR-pOrtable the user can characterize any film or stack of films in the 25nm to 90μm thickness range, either in the lab environment or at the field becoming a truly Point of Need (PoN) tool., …

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accessories A wide range of accessories is available in order to meet particular measurements needs. The accessories list include Reflection or Cuvettes Holders, special holders, flow cells, optical filters, external sensors, hot plate, liquid cells, gas environment chambers and many more. It is also possible to design a special requirement tool upon request …

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FR-PORTABLE


BROCHURES

FR-tools

  • FR-pOrtable: A USB-powered portable tool to meet your film characterization needs (thickness, optical properties).
  • FR-Basic: A modular tool to meet your film characterization needs (thickness, optical properties).
  • FR-uProbe: Localized film characterization through optical microscope
  • FR-Education: The entry-level film characterization tool at low cost
  • FR-Scanner: Automated and fast mapping of film thickness & optical properties over large areas
  • FR-Thermal: Film Characterization during thermal treatment
  • FR-Liquid: Film Characterization during wet processing

PM-tools

  • PM-QE : Electro-Optical haracterization of Solar cells (Internal & External Quantum Efficiency
  • PM-Haze: A modular tool for the evaluation of total reflectance and transmittance measurements

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