The World’s Ultimate Stylus Surface Profilers

Bruker’s Dektak® stylus profilers are the product of over four decades of proprietary technology advances. They provide repeatable, accurate measurements on varied surfaces, from traditional 2D roughness surface characterization and step height measurements to advanced 3D mapping and film stress analyses.

Dektak surface profilers have been widely accepted as a superior solution for measuring thin film thickness, stress, and surface roughness and form in applications ranging from educational research verification to semiconductor process control. More recently, Dektak systems have served as superior characterization tools for the growing solar cell market, and have been adopted by many major photovoltaic solar cell manufacturers.


Bruker’s DektakXT® Stylus Profiler features a revolutionary design that enables 4 angstrom repeatability. This major milestone in stylus profiler performance is the culmination of forty years of Dektak® innovation and industry leadership.Through its combination of industry firsts, DektakXT delivers the ultimate in performance, ease of use and value to enable better process monitoring from R&D to QC. The technological breakthroughs incorporated in Dektak enable critical nanometer-level surface measurements for the microelectronics, semiconductor, solar, high-brightness LED, medical, and materials science industries.

Dektak XTL

The Dektak XTL stylus profiler provides extremely accurate, repeatable, and reproducible metrology for a wide range of applications. With its ability to accommodate samples up to 350mm x 350mm, this system finally brings legendary Dektak performance to 200mm and 300mm wafer manufacturing. The Dektak XTL features  integrated isolation with interlocking doors, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation enhances manufacturing throughput.